Integrated actuator manifold for multiple valve assembly

ABSTRACT

An actuator assembly includes a unitary actuator housing defining a plurality of actuator cavities each extending along a central axis from an upper surface of the actuator housing to a lower surface of the actuator housing. A plurality of actuating members are each disposed in an upper counterbore portion of a corresponding one of the plurality of actuator cavities and movable within the corresponding actuator cavity. A plurality of output shafts each extend through a lower bore in a corresponding one of the plurality of actuator cavities, with each output shaft being driven by a corresponding one of the plurality of actuating members.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority to and all benefit of U.S. ProvisionalPatent Application Ser. No. 62/801,379, filed on Feb. 5, 2019 andentitled INTEGRATED ACTUATOR MANIFOLD FOR MULTIPLE VALVE ASSEMBLY, andU.S. Provisional Patent Application Ser. No. 62/801,388, filed on Feb.5, 2019 and entitled VALVE MANIFOLD ARRANGEMENTS FOR GAS DISTRIBUTIONSYSTEM, the entire disclosures of each of which are incorporated hereinby reference.

BACKGROUND

Fluid systems often include multiple valves arranged for mixing,switching, purging, and other such controls of one or more types offluid, for example, for gas distribution employed in the manufacture ofsemiconductor wafers. Multiple valve arrangements have been provided inone or more manifold valve blocks, thereby reducing assembly size andthe number of fluid connections.

SUMMARY

In an exemplary embodiment of the present disclosure, an actuatorassembly includes a unitary actuator housing defining a plurality ofactuator cavities each extending along a central axis from an uppersurface of the actuator housing to a lower surface of the actuatorhousing. A plurality of actuating members are each disposed in an uppercounterbore portion of a corresponding one of the plurality of actuatorcavities and movable within the corresponding actuator cavity. Aplurality of output shafts each extend through a lower bore in acorresponding one of the plurality of actuator cavities, with eachoutput shaft being driven by a corresponding one of the plurality ofactuating members.

In another exemplary embodiment of the present disclosure, a fluiddistribution system includes a mass flow controller and first and secondmanifold assemblies. The mass flow controller has a first end port and asecond end port extending from a lower end of the mass flow controller,proximate corresponding first and second sides of the mass flowcontroller, for lateral flow through the mass flow controller from thefirst end port to the second end port. The first manifold assemblyincludes a first end connection coupled to the first end port of themass flow controller. The first manifold assembly includes a firstmanifold body extending parallel to the first side of the mass flowcontroller, and a plurality of first valve subassemblies arranged acrossa plane extending substantially parallel to the first side of the massflow controller, with valve movement perpendicular to the first side ofthe mass flow controller. The second manifold assembly includes a secondend connection coupled to the second end port of the mass flowcontroller, wherein the second manifold assembly includes a secondmanifold body and a plurality of second valve subassemblies.

BRIEF DESCRIPTION OF THE DRAWINGS

Further advantages and benefits will become apparent to those skilled inthe art after considering the following description and appended claimsin conjunction with the accompanying drawings, in which:

FIG. 1 illustrates a cross-sectional schematic view of a multi-valveassembly including an actuator manifold assembled with a plurality ofvalve segments, in accordance with an exemplary embodiment of thepresent disclosure;

FIG. 2 illustrates a side cross-sectional view of an actuator manifoldassembly, in accordance with an exemplary embodiment of the presentdisclosure;

FIG. 3 illustrates another side cross-sectional view of the actuatormanifold assembly of FIG. 2, with the actuator housing shown in phantomto illustrate additional features of the actuator manifold assembly;

FIG. 4 illustrates a cross-sectional view of an actuator manifoldassembly with a sensor manifold, in accordance with another exemplaryembodiment of the present disclosure;

FIG. 5 illustrates a lower perspective view of a multi-valve assembly,in accordance with another exemplary embodiment of the presentdisclosure;

FIG. 5A illustrates an upper perspective view of the multi-valveassembly of FIG. 5;

FIG. 6 illustrates a cross-sectional view of the multi-valve assembly ofFIG. 5;

FIG. 7 illustrates an upper perspective view of the valve manifold bodyof the multi-valve assembly of FIG. 5;

FIG. 8 illustrates a top cross-sectional view of the valve manifold bodyof the multi-valve assembly of FIG. 5;

FIG. 9 illustrates an upper perspective view of the actuator manifoldhousing of the multi-valve assembly of FIG. 5, shown in phantom toillustrate additional features of the manifold housing;

FIG. 10 illustrates a perspective phantom view of an actuator manifoldhousing including a mounting surface and internal actuating fluidpassages arranged to accommodate a series of solenoid pilot valves, inaccordance with another exemplary embodiment of the present disclosure;

FIG. 11 illustrates another perspective phantom view of the actuatormanifold housing of FIG. 10;

FIG. 12 illustrates a perspective view of the actuator manifold housingof FIG. 10, with installed actuating pistons and assembled with a seriesof solenoid piston valves;

FIG. 13 illustrates a top plan view of an exemplary gas distributionsystem;

FIG. 14 illustrates a perspective view of another exemplary gasdistribution system;

FIG. 15 schematically illustrates a gas distribution system havingactuated valve manifolds oriented perpendicular to, or extendinglaterally from, a mass flow controller;

FIG. 16 illustrate a schematic view of a gas distribution system havingactuated valve manifolds oriented parallel to a mass flow controller, inaccordance with another exemplary embodiment of the present disclosure;

FIG. 17 illustrate a schematic view of another gas distribution systemhaving actuated valve manifolds oriented parallel to a mass flowcontroller, in accordance with another exemplary embodiment of thepresent disclosure;

FIG. 18 illustrates a perspective view of a gas distribution system, inaccordance with another exemplary embodiment of the present disclosure;

FIG. 19 illustrates another perspective view of the gas distributionsystem of FIG. 18;

FIG. 20 illustrates an end view of the gas distribution system of FIG.18;

FIG. 21 illustrates an end view of a middle section of the gasdistribution system of FIG. 18; and

FIG. 22 illustrates a perspective view of an inlet valve manifold bodyof the gas distribution system of FIG. 18, shown in phantom toillustrate internal passages of the manifold body.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

The Detailed Description merely describes exemplary embodiments and isnot intended to limit the scope of the claims in any way. Indeed, theinvention as claimed is broader than and unlimited by the exemplaryembodiments, and the terms used in the claims have their full ordinarymeaning. For example, while specific exemplary embodiments in thepresent application describe normally closed (e.g., spring biased to aclosed valve position) pneumatic actuator assemblies for multiplediaphragm valve manifolds, one of more of the features described hereinmay additionally or alternatively be applied to other types ofactuators, including, for example, normally open (e.g., spring biased toan open valve position) actuator assemblies, double acting (e.g., fluidpressurized actuation in both directions) actuator assemblies, othertypes of remotely actuated actuator assemblies (e.g., hydraulicactuator, electric actuator, piezoelectric actuator, phase changeactuator, shape memory alloy actuator), and manually operated (e.g.,knob/handle operated) actuator assemblies. Further, one of more of thefeatures described herein may additionally or alternatively be appliedto use with other types of multiple valve manifolds (e.g., bellowsvalves, needle valves, etc.), single valve assemblies, and other fluidsystem components (e.g., pressure regulators, filters, etc.).Additionally, while the geometries and arrangements of many of themanifold body features described herein are such that their productionis facilitated by additive manufacturing, such as 3-D printing, othermanufacturing methods may be utilized to fabricate body componentshaving one or more of the features described herein, such as, forexample, stacked plate assembly, machining, welding, brazing, andcasting (e.g., investment casting, sand casting, lost wax casting),independently or in combination.

While various inventive aspects, concepts and features of the inventionsmay be described and illustrated herein as embodied in combination inthe exemplary embodiments, these various aspects, concepts and featuresmay be used in many alternative embodiments, either individually or invarious combinations and sub-combinations thereof. Unless expresslyexcluded herein all such combinations and sub-combinations are intendedto be within the scope of the present inventions. Still further, whilevarious alternative embodiments as to the various aspects, concepts andfeatures of the inventions—such as alternative materials, structures,configurations, methods, circuits, devices and components, software,hardware, control logic, alternatives as to form, fit and function, andso on—may be described herein, such descriptions are not intended to bea complete or exhaustive list of available alternative embodiments,whether presently known or later developed. Those skilled in the art mayreadily adopt one or more of the inventive aspects, concepts or featuresinto additional embodiments and uses within the scope of the presentinventions even if such embodiments are not expressly disclosed herein.Additionally, even though some features, concepts or aspects of theinventions may be described herein as being a preferred arrangement ormethod, such description is not intended to suggest that such feature isrequired or necessary unless expressly so stated. Still further,exemplary or representative values and ranges may be included to assistin understanding the present disclosure, however, such values and rangesare not to be construed in a limiting sense and are intended to becritical values or ranges only if so expressly stated. Still further,exemplary or representative values and ranges may be included to assistin understanding the present disclosure, however, such values and rangesare not to be construed in a limiting sense and are intended to becritical values or ranges only if so expressly stated. Parametersidentified as “approximate” or “about” a specified value are intended toinclude both the specified value and values within 10% of the specifiedvalue, unless expressly stated otherwise. Further, it is to beunderstood that the drawings accompanying the present application may,but need not, be to scale, and therefore may be understood as teachingvarious ratios and proportions evident in the drawings. Moreover, whilevarious aspects, features and concepts may be expressly identifiedherein as being inventive or forming part of an invention, suchidentification is not intended to be exclusive, but rather there may beinventive aspects, concepts and features that are fully described hereinwithout being expressly identified as such or as part of a specificinvention, the inventions instead being set forth in the appendedclaims. Descriptions of exemplary methods or processes are not limitedto inclusion of all steps as being required in all cases, nor is theorder that the steps are presented to be construed as required ornecessary unless expressly so stated.

In the present disclosure, the term “vertical” is used to describe adirection substantially perpendicular to a base (or bottom) surface ofthe fluid component body, and the term “horizontal” is used to describea direction substantially parallel to the base surface of the fluidcomponent body. It is to be understood that the fluid component body maybe mounted or arranged in any suitable orientation (e.g., with the basesurface of the fluid component body extending substantially vertically,or at some other angle).

According to an exemplary aspect of the present disclosure, a multiplevalve assembly may be provided with actuators (e.g., pneumaticallyoperated actuators) disposed in a single, unitary housing block ormanifold, providing a plurality of actuator cavities in which valveactuating mechanisms (e.g., pneumatic actuating mechanisms, hydraulicactuating mechanisms, electric actuating mechanisms, piezoelectricactuating mechanisms, phase change actuating mechanisms, shape memoryalloy actuating mechanisms) are disposed. In some embodiments, theactuator housing may additionally include integrated porting or internalpassages to supply actuating fluid to each of the plurality of actuatorcavities, which may be arranged to simplify the supply of actuatingfluid to the actuator manifold. For example, the internal passages mayextend to integral connections (e.g., press-fit push-to-connectfittings) arranged on a common exterior surface of the actuator housingblock. As another example, the internal passages may intersect with alower portion of the actuator cavities for upward pressurized actuationof an actuating member (e.g., internal piston), for example, toeliminate the need for additional fluid passages and corresponding sealsfor the actuating arrangements.

FIG. 1 illustrates a cross-sectional schematic view of a multi-valveassembly 100 including an actuator manifold 120 assembled with aplurality of valve segments 140 a, 140 b, each including a valvesubassembly 150, for independent actuation of a valve control element153 (e.g., diaphragm, regulating stem, plug, ported ball, etc.) tocontrol fluid flow through each of the plurality of valve segments. Theactuator manifold 120 includes a housing 125 defining a plurality ofactuator cavities 122 a, 122 b each retaining an actuating member 130(e.g., fluid driven piston, motor, etc.) operable to drive an outputshaft 133 of the actuating mechanism. The output shaft 133 extendsthrough a lower bore 123 a, 123 b in the actuator cavity 122 a, 122 band is movable (e.g., rotationally and/or axially) to actuate thecorresponding valve control element 153 within the valve cavity 142 a,142 b to control fluid flow between valve passages 141 a, 143 a, 141 b,143 b.

The actuator cavities 122 a, 122 b may be enclosed by cover portions 126a, 123 b, for example, to protect the actuating member 130 from moistureor other contamination, and/or to define actuation limits of theactuating mechanisms (e.g., defining a piston stop). While the coverportions 126 a, 126 b may be formed from separate components (e.g.,individual caps or plates), in another embodiment, the cover portionsare defined by a cover plate 126 assembled with the actuator housing125, for example, by fasteners installed through aligned mounting holes(not shown) in the actuator housing and cover plate.

While the valve segments 140 a, 140 b may be formed from separate valvebodies individually assembled with the actuator housing 125, in anotherembodiment, the valve segments 140 a, 140 b are integrated portions of amulti-valve manifold 140 and defined by a valve manifold body 145assembled with the actuator housing 125, for example, by fastenersinstalled through aligned mounting holes (not shown) in the actuatorhousing 125 and valve manifold body 145. Many different types ofmulti-valve manifold bodies may be utilized. Exemplary multi-valvemanifold bodies are shown and described in co-pending U.S. patentapplication Ser. No. 16/445,365, the entire disclosure of which isincorporated herein by reference.

FIGS. 2 and 3 illustrate an exemplary pneumatically actuated actuatormanifold 220, including an actuator housing 225 defining actuatorcavities 222 a, 222 b, 222 c for retaining a plurality of actuatorarrangements or actuating mechanisms 230 for actuating correspondingvalve arrangements, described in greater detail below. Each actuatingmechanism 230 includes a piston 231 and a biasing member 235 (e.g., coilspring or stack of Belleville spring washers, as shown) applying abiasing force to the piston. The piston 231 includes a lower annularstop portion 232 seated in a recessed counterbore portion 224 a, 224 b,224 c of the actuator cavity 222 a, 222 b, 222 c and an output shaft 233extending through a lower bore 223 a, 223 b, 223 c of the actuatorcavity. O-ring seals 236, 237 are installed around the piston OD andoutput shaft 233 to provide a leak tight, pressure containing sealbetween the piston 231 and the actuator housing 225. The actuatorcavities 222 a, 222 b, 222 c are enclosed by cover portions 226 a, 226b, 226 c of a cover plate 226 assembled with the actuator housing 225 byfasteners 261 installed through aligned mounting holes 228, 238 in theactuator housing 225 and cover plate 226 (FIG. 3).

According to another aspect of the present disclosure, to operate theactuating mechanisms, the actuator housing may be provided with internalactuating fluid passages that intersect with lower portions of theactuator cavity counterbores to apply fluid pressure to a lower surfaceof the piston for upward movement of the piston against the biasingmember(s). These actuating fluid passages may extend through the top endof the actuator manifold (e.g., through the cover plate) to forattachment of the actuator pressure lines to the exposed top surface ofthe actuator manifold. In the illustrated embodiment, as shown in FIG.3, the actuator housing 225 includes integrated actuator inlet ports 221b, 221 c extending to internal actuating fluid passages 227 b, 227 cintersecting with the recessed portions 224 b, 224 c of the actuatorcavities 222 b, 222 c. Many different types of actuator inlet portfittings may be provided, including for example, as shown,push-to-connect fittings for plastic hose ends.

According to another aspect of the present disclosure, each actuatingarrangement may be provided with a manually adjustable stop for useradjustment of the upper axial position of the piston, for example, tocontrol fluid flow rate when the corresponding valve is opened. In theillustrated embodiment, the manually adjustable stops are defined by setscrews 263 installed in the cover plate 226 in alignment with upper endportions 234 of the corresponding pistons 231, and threadably adjustableto position a lower surface of the set screw 263 to abut the upper endportion 234 when the actuator arrangement 230 is actuated, therebylimiting fluid pressurized (e.g., upward) movement of the piston 231.

According to another aspect of the present disclosure, each actuatorarrangement may be provided with a sensor configured to detect aposition of the corresponding piston, for example, to identify abiased/return actuator position (e.g., corresponding to a closed valveposition) or a pressurized/actuated actuator position (e.g.,corresponding to an open valve position). In one such embodiment, asshown in FIG. 4, a sensor board or sensor manifold 270 may be assembledwith the actuator manifold 220 to provide a position sensor 271 for eachof the actuator arrangements 230, and circuit communication between theposition sensors and a single electrical connector or data port 275. Forexample, the position sensors may be actuated (e.g., mechanical,magnetic, or proximity switch actuation) by pins or other such inserts(shown schematically at 272) disposed between the sensors 271 and theupper end portions 234 of the pistons 231 (e.g., extending through setscrews) or may be actuated directly by the upper portions of the pistons(not shown). In the illustrated embodiment, the sensor manifold 270includes upper and lower plates 273, 274 between which a membrane switchlayer 276 is sandwiched. The sensors 271 (extending through holes in thelower plate 274) and data port 275 (extending through a hole in theupper plate 273) are carried by the membrane switch layer 276, andcircuitry (not shown) on the membrane switch layer connects the sensors271 with the data port 275, for example, to provide a single wiredconnection between the position sensors 271 and an external device.

According to another aspect of the present disclosure, the alignedpositioning of the actuator inlet ports on the actuator manifold mayfacilitate connectivity with directly mounted solenoid pilot valves forindependent and/or automatic control of each of the actuatorarrangements. In one such embodiment, the solenoid pilot valves may beconnected in parallel to provide for a single supply port and/or exhaustport for the assembly. As one example, a solenoid manifold, having aseries of parallel pilot valves, may be mounted to the actuator manifoldto provide a compact arrangement for actuating each of the actuatingmechanisms of the actuator manifold, while provided a single connectionto a source of pressurized actuating fluid (e.g., air, nitrogen). FIG. 3schematically illustrates solenoid valves or pilot valves 280 b, 280 c(which may be separate valves or part of a solenoid manifold assembly280) directly mounted (e.g., by bolts or other fasteners) to the housing225 or cover plate 226 of the actuator manifold 220, with solenoidoutlet ports 281 b, 281 c connected to the actuator inlet ports 221 b,221 c. The solenoid pilot valves 280 b, 280 c may be connected inparallel to provide for a single supply port 282 and exhaust port 283for the assembly. A shutoff valve 285 (e.g., toggle valve) may beconnected with the supply port 282, for example, to disable the entireactuator assembly. Alternatively, for a non-linear arrangement ofactuator inlet ports on an actuator manifold body, separate solenoidpilot valves may be directly mounted (e.g., by bolts or other fasteners)to actuator inlet ports (not shown) disposed on a top surface of theactuator manifold (e.g., on an actuator cover plate). One example of adirect mounted solenoid valve is the Bullet Valve®, manufactured by MACValves, Inc. In one such embodiment (not shown), the actuator housingblock and/or cover plate may be provided with cavities sized topartially or fully receive the solenoid valves within the actuatorhousing.

Many different types of multiple valve arrangements may be utilized withan integrated actuator manifold, as described in the present disclosure.In an exemplary embodiment, a multiple diaphragm valve manifoldarrangement is assembled with an integrated multiple pneumatic actuatormanifold. FIGS. 5-9 illustrate various views of an exemplary seven-valvemanifold assembly 300 including a multi-actuator manifold 320 (which maybe similar to the actuator manifold 220 of FIGS. 2-4) having an actuatorhousing 325 (see FIG. 8) assembled with a manifold valve body 345 of amultiple valve manifold 340. In other embodiments, a different number ofvalves may be provided.

As shown in FIG. 7, the exemplary manifold valve body 345 includes sevenvalve body segments 345 a-g each having an upper perimeter wall portiondefining a valve cavity 342 a-g, and a lower base portion definingcentral flow ports 346 a-g and offset flow ports 347 a-g, 348 a, 348 f,and a plurality of flow passages 341 a-

extending between the flow ports 346 a-g, 347 a-g, 348 a, 348 f andvalve end ports 349 a-i connectable to a fluid system (e.g., by welding,fitting connections, etc.).

The valve flow ports 346 a-g, 347 a-g, 348 a, 348 f and valve end ports349 a-i may be connected using a variety of flow passage patterns orarrangements. In the illustrated embodiment, as shown in thecross-sectional view of FIG. 8, a first flow passage 341 a extendsbetween a first end port 349 a and an offset flow port 347 a of thefirst valve body segment 345 a. A second flow passage 341 b extendsbetween a second end port 349 b and central flow ports 346 a, 346 b ofthe first and second valve body segments 345 a, 345 b. A third flowpassage 341 c extends between a third end port 349 c and an offset flowport 347 b of the second valve body segment 345 b. A fourth flow passage341 d extends between a fourth end port 349 d, a central flow port 346 cof the third valve body segment 345 c, and an offset flow port 347 e ofthe fifth valve body segment 345 e. A fifth flow passage 341 e extendsbetween a fifth end port 349 e and a central flow port of the fourthvalve body segment 345 d. A sixth flow passage 341 f extends between asixth end port 349 f and an offset flow port 347 f of the sixth valvebody segment 345 f. A seventh flow passage 341 g extends between aseventh end port 349 g and an offset flow port 347 g of the seventhvalve body segment 345 g. An eighth flow passage 341 h extends betweenan eight end port 349 h and central flow ports 346 b, 346 e of thesecond and fifth valve body segments 345 b, 345 e. A ninth flow passage341 i extends between a ninth end port 349 i and the central flow port346 g of the seventh valve body segment 345 g. A tenth flow passage 341j extends between another offset flow port 348 a of the first valve bodysegment 345 a and an offset flow port 347 d of the fourth valve bodysegment 345 d. An eleventh flow passage 341 k extends between offsetflow ports 347 c, 348 f of the third and sixth valve body segments 345c, 345 f. A twelfth flow passage 341€ extends between the central flowports 346 f, 346 g of the sixth and seventh valve body segments 345 f,345 g.

As shown, the first through seventh end ports 349 a-g extend vertically,laterally offset from the actuator housing 325, to provide for coplanarfluid system connections (e.g., modular C-seal connections). While theeighth and ninth end ports 349 h, 349 i are show as laterally extending,truncated conduit ends, these end ports may also extend vertically,laterally offset from the actuator housing 325.

As shown in FIG. 7, apertured mounting bosses 301 may be provided tofacilitate mounting of the manifold body 345 within a system (e.g., to aplate or other such base component of a fluid system). As shown, themounting bosses may be joined or fused with an adjacent perimeter wallportion of one of the valve segments to facilitate manufacturing, toreduce overall size of the manifold body 345 and/or to strengthen orreinforce these joined portions. The mounting bosses 301 mayadditionally be provided with tapers and/or counterbores, for example,to facilitate centering the head of the installed fastener (e.g.,mounting screw, not shown).

In the illustrated embodiment, valve arrangements or subassemblies 350are installed within the valve cavities 342 a-g of the valve manifoldbody 345. Many different types of valve arrangements may be utilized. Inthe illustrated embodiment, as shown in the cross-sectional view of FIG.6, the exemplary valve subassemblies 350 each include a flexiblediaphragm 353 and an annular seat carrier 352 received in the valvecavity 342 a-g. The seat carrier 352 includes a lower seal portion 354that seals against a recessed surface 344 a-g around a central port 346a-gand an upper seal portion or valve seat 355 that seals against thediaphragm 353 when the diaphragm is moved to the closed position. Thediaphragm 353 may, but need not, be welded to the seat carrier 352(e.g., around an outer periphery of the diaphragm and seat carrier), forexample, to retain the diaphragm with the seat carrier as a subassembly.A threaded retainer 356 is installed in the valve cavity 342 a-g toclamp the seat carrier 352 and diaphragm 353 against the recessedsurface 344, with an outer male threaded portion of the retainer 356mating with an inner female threaded portion of the valve cavity 342a-g.

The actuator manifold 320 includes a plurality of actuator arrangementsor actuating mechanisms 330 for actuating the valve arrangements 350,each disposed in an actuator cavity 322 a-g in the actuator housing 325.Many different types of actuator arrangements may be utilized. In theillustrated embodiment, as shown in the cross-sectional view of FIG. 6,the exemplary actuator subassemblies 330 each include a piston 331 and abiasing member 335 (e.g., coil spring or Belleville spring washers, asshown). The piston 331 includes a lower annular stop portion 332 seatedin a recessed counterbore portion 324 a-g of the actuator cavity 322 a-gand an output shaft 333 extending through a lower bore 323 a-g of theactuator cavity for engagement with the valve arrangement 350, forexample, engaging a button 359 to apply a closing force to the diaphragm351 and against the valve seat. O-ring seals 336, 337 are installedaround the piston OD and output shaft 333 to provide a leak tight,pressure containing seal between the piston 331 and the actuator housing325. As shown, a cover plate 326 may be assembled with the actuatorhousing 325 to enclose the actuator cavities 322 a-g. In otherembodiments (not shown), separate cover plates or end caps may beprovided for each actuator arrangement.

Each actuator arrangement 330 includes a manually adjustable stopdefined by a set screw 363 installed in the cover plate 326 in alignmentwith upper end portions 334 of the corresponding pistons 331, andthreadably adjustable to position a lower surface of the set screw 363to abut the upper end portion 334 when the actuator arrangement 330 isactuated, thereby limiting fluid pressurized (e.g., upward) movement ofthe piston 331.

As shown in FIG. 9, the actuator housing 325 includes integratedactuator inlet port connections 321 a-g (aligned with openings in thecover plate 326) extending to internal actuating fluid passages 327 a-gintersecting with the recessed portions 324 a-g of the actuator cavities322 a-g. Many different types of actuator inlet port connections may beprovided, including, for example, push-to-connect fittings for plastichose ends. To actuate the valve arrangements 350 from the biased orreturn (e.g., closed) position to the pressurized or actuated (e.g.,open) position, pressurized fluid is applied to the actuator inlet portconnection 321 a-g and through the internal actuating fluid passage 327a-g to apply fluid pressure to a lower surface of the piston 331 forupward movement of the piston against the biasing member(s) 335, toallow movement of the diaphragm 353 to an open position.

In the embodiment of FIGS. 5-9, the actuator inlet port connections 321a-g are positioned in an array, with each port connection generallyadjacent to the corresponding actuator cavity 322 a-g, as shown in FIG.5A. In other embodiments, an actuator manifold housing may be providedwith internal actuating fluid passages extending to actuator inlet portsaligned in series along a mounting surface of the actuator manifoldhousing, to accommodate direct mounting of a series of solenoid pilotvalves for compact, controlled actuation of the actuator arrangements.FIGS. 10-12 illustrate an exemplary actuator manifold housing 425including a mounting surface and internal actuating fluid passagesconfigured to accommodate a series of solenoid pilot valves foroperation of a multi-valve manifold arrangement. While the illustratedactuator manifold housing 425 is configured for operation of a twelvevalve manifold arrangement, in other embodiments, an actuator manifoldmay be configured for operation of a different number of valves.

As shown, the exemplary actuator manifold housing 425 includes twelveactuator cavities 422 a-

, recessed from a front side of the housing and arranged in a 2×6 array,to retain actuating arrangements. These cavities may be enclosed by acover plate (not shown) mounted to the actuator manifold housing 425,similar to the embodiments of FIGS. 2-9. While the cavities may beshaped to accommodate circular pistons, similar to the embodiments ofFIGS. 2-9, in the embodiment of FIGS. 10-12, the actuator cavities 422a-

have a substantially square cross-sectional shape (e.g., with flat,equal sides and rounded corners), to accommodate substantially squareshaped pistons 431 (FIG. 12), for example, to reduce the size of theactuator housing 425, by reducing spaces between the adjacent cavities,while maintaining a sufficient fluid-driven surface area of the pistons.

The actuator manifold housing 425 includes actuator inlet ports 421 a-

(FIG. 11) aligned in series along a mounting surface 410 on a rear sideof the actuator manifold housing. The mounting surface 410 includesmounting holes 411 positioned for mounting (e.g., using bolts or otherfasteners) a series of solenoid pilot valves 480 a-

(FIG. 12), to align outlet ports of the solenoid pilot valves with theactuator inlet ports 421 a-

. Internal actuating fluid passages 427 a-

extend from the actuator inlet ports 421 a-

to intersect with recessed or bottom portions of the actuator cavities422 a-

, such that when each solenoid pilot valve 480 a-

is actuated (e.g., by an electric actuation signal) to an open position,pressurized fluid is transmitted through the corresponding actuatingfluid passage 427 a-

to move the piston 431 within the corresponding actuator cavity 421 a-

to an actuated or pressurized position.

While the solenoid pilot valves may be independently or collectively(e.g., as a solenoid manifold) directly connected to a source ofpressurized actuating fluid, in another embodiment, the actuatormanifold may be provided with a pressurization port (e.g., forconnection with a pressurized air line) connected with branchinginternal pressurization passages to supply pressurized actuating fluidto each of the solenoid pilot valves, thereby eliminating external fluidconnections to the solenoid pilot valves. In the illustrated embodimentof FIG. 10, the actuator manifold housing 425 includes a pressurizationport 412 connected with an internal pressurization passage 413 havingbranches 413 a-

extending to the mounting surface 410 to align with inlet ports of themounted solenoid pilot valves 480 a-

. As shown, the exemplary actuator manifold housing 425 may additionallyinclude a vent port 414 connected with an internal vent passage 415having branches 415 a-

, extending to the mounting surface 410 to align with vent ports of themounted solenoid pilot valves 480 a-

.

The overall shape and internal flow path arrangements of an actuatorhousing block may make it difficult to manufacture using conventionalmachining, molding, or casting techniques. According to an aspect of thepresent disclosure, the actuator housing block may be fabricated usingadditive manufacturing to produce a monolithic body having discrete, butpartially joined or fused, valve segments and conduit segments. Examplesof additive manufacturing techniques that may be utilized include, forexample: laser powder bed fusion (direct metal laser sintering or“DMLS,” selective laser sintering/melting or “SLS/SLM,” or layeredadditive manufacturing or “LAM”), electron beam powder bed fusion(electron beam melting or “EBM”), ultrasonic additive manufacturing(“UAM”), or direct energy deposition (laser powder deposition or “LPD,”laser wire deposition or “LWD,” laser engineered net-shaping or “LENS,”electron beam wire deposition). Providing an actuator housing block as asingle, monolithic component may eliminate assembly costs, reducecomponent wear, reduce adverse effects from heat cycling, improvecorrosion behavior (galvanic effects, crevice, stress corrosioncracking), and reduce lead time to manufacture. Further, fabricationusing additive manufacturing may reduce the amount of raw material used(e.g. stainless steel or other metals), and may reduce the size andweight of the finished body.

Many systems require a large number of valves and correspondingactuators, and would benefit from compact, manifold-based valve andactuator arrangements. For example, gas distribution systems, such asultra-high purity (UHP) gas boxes, can require dozens of remotelyoperable valves (and corresponding actuators) installed upstream anddownstream of one or more mass flow controllers (MFCs) for precisecontrol of gas flow, for example, for semiconductor wafer processing.These assemblies can occupy a large footprint, having valves V extendinglaterally outward from a row of MFCs C, as shown in FIG. 13. Thefootprint of the system may be reduced by utilizing rows of multi-valvemanifolds M, as shown in FIG. 14.

FIG. 15 schematically illustrates an exemplary fluid system 1000,including a MFC 1050 having first side ports 1051 and second side ports1052 extending from a lower end or base 1053 of the MFC, proximatecorresponding first and second sides 1054, 1055 of the MFC, for lateralflow through the MFC from the first side ports to the second side ports.A first manifold assembly 1100 includes first end connections 1109coupled to the first side ports 1051 of the MFC 1050, and a secondmanifold assembly 1200 includes second end connections 1209 coupled tothe second side ports 1052 of the MFC. The first and second manifoldassemblies 1100, 1200 include manifold bodies 1145, 1245 that extendlaterally outward from the MFC 1050 and include a plurality of valvesubassemblies 1150, 1250 arranged along a plane P1 extendingsubstantially parallel to the laterally extending base 1053 of the MFC(with valve movement perpendicular to the base of the MFC). Actuatorarrangements 1120, 1220 (e.g., any of the actuator manifolds describedherein) are assembled with upper ends of the manifold bodies 1145, 1245for remote actuation of the manifold valve subassemblies 1150, 1250.Valve fluid passages 1141, 1241 extend to end ports 1149, 1249 thatextend longitudinally from the manifold bodies 1145, 1245.

According to another exemplary aspect of the present application, afluid distribution system (e.g., an ultra-high purity gas distributionsystem) including a fluid processing device (e.g., a mass flowcontroller) having a housing having a base defining a width extendinglaterally between first side (e.g., inlet) and second side (e.g.,outlet) ports and first and second side walls defining a height greaterthan the width, may be provided with first side (e.g., inlet) and/orsecond side (e.g., outlet) valve manifold assemblies connected to thefirst side and second side ports of the housing and extending parallelto the first and second side walls of the housing. Such an arrangementmay, for example, provide for a reduced footprint size of the fluiddistribution by reducing the lateral extent of the valve manifoldassemblies.

One such exemplary fluid system 2000, schematically illustrated in FIG.15, includes a mass flow controller (MFC) 2050 having first side ports2051 and second side ports 2052 extending from a lower end or base 2053of the MFC, proximate corresponding first and second sides 2054, 2055 ofthe MFC, for lateral flow through the MFC from the first side ports tothe second side ports. A first manifold assembly 2100 includes first endconnections 2109 coupled to the first side ports 2051 of the MFC 2050,and a second manifold assembly 2200 includes second end connections 2209coupled to the second side ports 2052 of the MFC. The first and secondmanifold assemblies 2100, 2200 include manifold bodies 2145, 2245 thatextend along planes P2 a, P2 b parallel to the first and second sides2054, 2055 of the MFC 2050, with actuator arrangements 2120, 2220 (e.g.,actuator manifolds, as described herein) assembled with laterallyoutward facing sides of the manifold bodies. The manifold bodies 2145,2245 enclose a plurality of valve subassemblies 2150, 2250, operated bythe actuator arrangements 2120, 2220 and arranged along the verticalplanes P2 a, P2 b (with valve movement perpendicular to the sides of theMFC). Valve fluid passages 2141, 2241 extend to end ports 2149, 2249that extend longitudinally from the manifold bodies 2145, 2245. Thisarrangement reduces a lateral dimension of the fluid distribution system2000, as compared to a fluid distribution system having valve assembliesextending laterally outward of the first and second sides of a MFC, asshown in FIG. 14.

In other embodiment, valve manifolds with laterally outward extendingend ports may be desirable. FIG. 16 schematically illustrates anexemplary fluid system 3000 including a mass flow controller (MFC) 3050having first side ports 3051 and second side ports 3052 extending from alower end or base 3053 of the MFC, for lateral flow through the MFC fromthe first side ports to the second side ports. As shown, the side ports3051, 3052 may extend laterally outward of the sides 3054, 3055 of theMFC 3050, for coupling with end connections 3109, 3209 of first andsecond manifold assemblies 3100, 3200. The first and second manifoldassemblies 3100, 3200 include manifold bodies 3145, 3245 that extendalong planes P2 a, P2 b parallel to, and spaced apart from, the firstand second sides 3054, 3055 of the MFC 3050, to accommodate actuatorarrangements 3120, 3220 (e.g., actuator manifolds, as described herein)assembled with laterally inward facing sides of the manifold bodies, andsandwiched between the MFC and the corresponding manifold body. Themanifold bodies 3145, 3245 enclose a plurality of valve subassemblies3150, 3250, operated by the actuator arrangements 3120, 3220 andarranged along the vertical planes P2 a, P2 b (with valve movementperpendicular to the sides of the MFC). Valve fluid passages 3141, 3241extend to end ports 3149, 3249 that extend laterally outward from themanifold bodies 3145, 3245. In other embodiments, other arrangements maybe provided, including, for example, a system having an inner lateralfirst manifold body with an outer lateral actuator manifold, and anouter lateral second manifold body with an inner lateral actuatormanifold.

The arrangements described herein may provide for compact automatedmulti-valve arrangements including mass flow controllers and dozens ofvalves, actuators, and solenoids in an assembly that enables the use offewer components, easier/faster installation, fewer connections, fewerpotential leak points, and a smaller footprint size. FIGS. 18-21illustrate various views of an exemplary gas distribution system 4000for installation in an ultra-high purity gas box, according to anotheraspect of the present disclosure.

In the exemplary embodiment, the gas distribution system 4000 includes abank of mass flow controllers (MFCs) 4050 including side ports 4051,4052 connected with first (inlet) and second (outlet) sets of actuatedmanifolds assemblies, 4100, 4200, 4300. While such a system may beconfigured to utilize any number of fluid system components, theexemplary system 4000 includes eighteen MFCs 4050, three twelve-valveinlet manifolds 4100, two twenty-eight valve outlet manifolds 4200, andone twelve-valve outlet manifold 4300, for compact control of 104valves.

As shown, the first (inlet) and second (outlet) side ports 4051, 4052 ofthe MFCs 4050 include elbow fittings 4057, 4058 (e.g., weld fittings)extending downward from the MFC base portions 4053 and laterally outwardfrom the first and second sides 4054, 4055 of the MFC, to connect withend connections 4109, 4209, 4309 of the multi-valve manifolds 4100,4200, 4300. The manifold assemblies 4100, 4200, 4300 include manifoldbodies 4145, 4245, 4345 that extend along planes P2 a, P2 b parallel to,and spaced apart from, the first and second sides 4054, 4055 of the MFCs4050, to accommodate actuator arrangements 4120, 4220, 4320 (e.g.,actuator manifolds, as described herein) assembled with laterally inwardfacing sides of the manifold bodies. The manifold bodies 4145, 4245,4345 enclose a plurality of valve subassemblies (not shown, but may besimilar to the other valve subassemblies described herein), operated bythe actuator arrangements 4120, 4220, 4320 and arranged along thevertical planes P2 a, P2 b (with valve movement perpendicular to thesides of the MFC). Valve fluid passages (not shown) extend to end ports4149, 4249, 4349 disposed on outer lateral surfaces of the manifoldbodies 4145, 4245, 4345.

The exemplary valve manifold actuator arrangements 4120, 4220, 4320include actuator manifold housings 4125, 4225, 4325 having actuatorinlet ports 4121, 4221, 4321 aligned in series along a surface 4110,4210, 4310 of the actuator manifold housing, for connection with sourcesof pressurized actuating fluid. As shown with the actuator arrangements4120 of the inlet manifold assemblies 4100 (but applicable to any of theactuator arrangements described herein), a series of solenoid pilotvalves 4180 may be mounted to the actuator manifold surface 4110 toalign outlet ports of the solenoid pilot valves with the actuator inletports 4121. As shown in the exemplary embodiments described herein, theactuator manifolds may be provided with internal actuating fluidpassages extending from the actuator inlet ports to intersect withactuator cavities, for pressurized actuation of the actuator arrangementwhen the solenoid is energized. Additionally, similar to the embodimentof FIG. 10, the actuator manifold housing 4125 may include apressurization port 4112 connected with an internal pressurizationpassage having branches extending to the mounting surface 4110 to alignwith inlet ports of the mounted solenoid pilot valves 4180, and a ventport 4114 connected with an internal vent passage having branchesextending to the mounting surface 4110 to align with vent ports of themounted solenoid pilot valves. As shown, a shutoff valve 4118 (e.g.,toggle valve, as shown) may be connected with the pressurization port,for example, to disable the entire solenoid operated actuator assembly4100. A lockout-tagout (LOTO) arrangement 4119 (e.g., a bracket thatreceives a locked padlock to block movement of the valve handle, asshown) may be assembled with the shutoff valve to facilitate lockout ofthe actuated system.

The exemplary twenty-eight-valve outlet manifolds 4200 include innerlateral valve subassemblies actuated by the inner lateral actuatorarrangements 4220, and outer lateral valve subassemblies actuated byouter lateral actuator arrangements 4290 (including actuator manifoldhousings 4295 having actuator inlet ports 4291) mounted to the outerlateral surfaces of the manifold bodies 4245. The outer lateral actuatorarrangements 4290 may cover limited portions of the outer lateralsurfaces of the manifold bodies 4245, for example, to accommodate theend ports 4249.

FIG. 22 illustrates an exemplary manifold body 4145 of an inlet manifold4100 of the system of FIGS. 18-21. The manifold body 4145 includes inletend ports 4149 a having passages extending to central ports 4146 a ofsupply valve cavities 4142 a. An offset port 4147 a of each supply valvecavity 4142 a is connected to a first offset port 4147 b of acorresponding bleed valve cavity 4142 b by a connecting passage 4143 a.A central port 4146 b of each bleed valve cavity 4142 b is connected toa bleed passage 4144 b that extends between purge end ports 4149 b. Asecond offset port 4148 b of each bleed valve cavity 4142 b is connectedwith the manifold body end connection 4109 by an outlet passage 4143 bto supply fluid to the end port 4051 of the MFC 4050 (FIGS. 18-21). Whena supply valve subassembly (not shown, but may be similar to the valvesubassembly 350 of FIG. 6) assembled with the supply valve cavity 4142 ais in an open position and the corresponding bleed valve subassembly(not shown, but may be similar to the valve subassembly 350 of FIG. 6)assembled with the bleed valve cavity 4142 b is in a closed position,fluid passes through the supply valve cavity, into the bleed valvecavity 4142 b, through the second offset port 4148 b and to the endconnection 4109. When the supply valve subassembly is in a closedposition and the corresponding bleed valve subassembly is in an openposition, fluid in the valve cavities 4142 a, 4142 b and end connection4109 may be purged from the manifold body 4145, for example, by applyinga purge gas to a purge end port 4149 b.

The inventive aspects have been described with reference to theexemplary embodiments. Modification and alterations will occur to othersupon a reading and understanding of this specification. It is intendedto include all such modifications and alterations insofar as they comewithin the scope of the appended claims or the equivalents thereof.

1. An actuator assembly comprising: a unitary actuator housing defininga plurality of actuator cavities each extending along a central axisfrom an upper surface of the actuator housing to a lower surface of theactuator housing; a plurality of actuating members each disposed in anupper counterbore portion of a corresponding one of the plurality ofactuator cavities and movable within the corresponding actuator cavity;and a plurality of output shafts each extending through a lower bore ina corresponding one of the plurality of actuator cavities, each outputshaft being driven by a corresponding one of the plurality of actuatingmembers.
 2. The actuator assembly of claim 1, wherein the plurality ofactuating members comprises a plurality of pistons, further wherein theactuator housing further defines a plurality of internal passages eachintersecting with a corresponding one of the plurality of actuatorcavities for fluid pressurization of a corresponding one of theplurality of pistons.
 3. The actuator assembly of claim 2, wherein theplurality of internal passages extends to corresponding inlet ports forattachment to a fluid pressure source.
 4. The actuator assembly of claim3, wherein each of the plurality of inlet ports is configured to receivea press-fit push-to-connect fitting.
 5. The actuator assembly of claim3, further comprising a plurality of solenoid valves each coupled to acorresponding one of the plurality of inlet ports.
 6. The actuatorassembly of claim 5, wherein each of the plurality of solenoid valves isconnected in fluid communication to provide a single supply port forpressurization of each of the plurality of pistons.
 7. The actuatorassembly of claim 5, wherein the actuator housing further comprises aninternal pressurization passage connected with a single supply port andextending to a plurality of branches, each of the plurality of branchesextending to an inlet port of a corresponding one of the plurality ofsolenoid valves to supply pressurized fluid to each of the plurality ofsolenoid valves.
 8. The actuator assembly of claim 6, further comprisinga shutoff valve connected with the single supply port and operable toprevent pressurization of each of the plurality of pistons.
 9. Theactuator assembly of claim 8, wherein the shutoff valve comprises alockout feature operable to secure the shutoff valve in a closedposition.
 10. The actuator assembly of claim 5, wherein each of theplurality of solenoid valves is installed in the actuator housing. 11.The actuator assembly of claim 2, wherein each of the plurality ofinternal passages intersects with a corresponding one of the pluralityof actuator cavities below the corresponding piston for fluidpressurization movement of the corresponding piston from a lower axialposition to an upper axial position.
 12. The actuator assembly of claim12, further comprising a plurality of biasing members each disposed in acorresponding one of the plurality of actuator cavities to bias thecorresponding piston toward the lower axial position.
 13. The actuatorassembly of claim 12, wherein each of the plurality of biasing memberscomprises a stack of Belleville springs.
 14. The actuator assembly ofclaim 2, wherein each of the plurality of pistons has a substantiallysquare cross-section.
 15. The actuator assembly of claim 1, furthercomprising a plurality of position sensors each actuated by acorresponding one of the plurality of actuating members to identify theposition of the corresponding actuating member.
 16. The actuatorassembly of claim 15, wherein each of the plurality of position sensorsis disposed on a circuit board assembled with the actuator housing. 17.The actuator assembly of claim 15, wherein each of the plurality ofposition sensors is in circuit communication with a single electricalconnector.
 18. The actuator assembly of claim 1, further comprising acover plate assembled with the upper surface of the actuator housing tocover the first and second actuator cavities.
 19. The actuator assemblyof claim 1, further comprising a plurality of manually adjustable stopsfor user adjustment of a limit position of a corresponding one of theplurality of actuating members.
 20. The actuator assembly of claim 1,wherein the actuator housing is produced using additive manufacturingtechniques.
 21. A multiple valve manifold assembly comprising: theactuator assembly of claim 1; a valve manifold body assembled with theactuator housing, the valve manifold body including a plurality of valvecavities each receiving a corresponding one of the plurality of outputshafts; a plurality of valve subassemblies disposed in the plurality ofvalve cavities and movable by operation of the corresponding outputshafts to control fluid flow through each of the plurality of valvesegments.
 22. A fluid distribution system comprising: a mass flowcontroller having a first end port and a second end port extending froma lower end of the mass flow controller, proximate corresponding firstand second sides of the mass flow controller, for lateral flow throughthe mass flow controller from the first end port to the second end port;a first manifold assembly including a first end connection coupled tothe first end port of the mass flow controller, wherein the firstmanifold assembly includes a first manifold body extending parallel tothe first side of the mass flow controller, and a plurality of firstvalve subassemblies arranged across a plane extending substantiallyparallel to the first side of the mass flow controller, with valvemovement perpendicular to the first side of the mass flow controller;and a second manifold assembly including a second end connection coupledto the second end port of the mass flow controller, wherein the secondmanifold assembly includes a second manifold body and a plurality ofsecond valve subassemblies. 23.-31. (canceled)